pBN Heaters and
Electrostatic Chucks
Description
Wafer handling at elevated temperatures can be challenging. Pyrolytic Boron Nitride Electrostatic Chucks (pBN ESCs) can hold wafers at temperatures exceeding 1000°C, making them the most versatile ESCs on the market. Wafers can be kept within very tight temperature ranges due to the high-density, multizone heating elements. pBN ESC’s high thermal shock resistance means it is mechanically robust even when exposed to rapid temperature swings.
- Momentive Technologies Pyrolytic Boron Nitride Electrostatic Chucks offer ultra-fast J-R chucking at the widest range of temperatures on the market, from 0 to 1000°C
- Customized plug-and-play integrated assemblies containing pBN heaters and/or chucks offer superior thermal uniformity, higher throughput, longer life and easier maintenance
- The materials selected for our heaters result in thermal shock resistance and exceptionally low thermal mass allowing for ramp rates of 100°C/min
- pBN is a fully dense material, making it ultra-high vacuum ready
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Applications
Key Features
- Power Density over 50watts/cm2
- Chucking force of up to 100g/cm2
- Up to Ø320mm (12.6”) in diameter
- High density heating elements provide up to 95% coverage of surface area
- Highly customizable mutli-zone heating and ESC capability for maximum temperature control
Standard Features
Momentive Technologies pBN ESC Modules can be equipped to handle even the most complex control scheme. Multi-zone heating, multi-zone chucking, backside gas, focusing rings and mesas are just a few of the features we can integrate into your custom design.
Momentive Technologies pBN heaters and ESCs have best in class temperature uniformity. The ESCs are manufactured via unique multistep CVD process. This process allows for high heating element densities and complex element layouts customized to your unique environment.
Manufacturing and Support
- High density heating elements result in excellent thermal uniformity
- Modules are customized to match each customer’s specific requirements
- Our team of application development engineers utilize a combination of thermal and fluid modeling to ensure our modules have the highest performance by working with our customers to exactly match their environment
In-House Capabilities
- Testing capabilities
- Simulation
- Design
Have questions or need more information about pBN Heaters and Electrostatic Chucks?
Download our product data sheet here.
